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EDWARDS SEMICONDUCTOR DRY PUMPS

Semiconductor Dry Pump Edwards IXL120 IXL120N, Service and Repair
Dry pump Series: iXL120

Variations of the model: iXL120N

Models Applications: Load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, wafer handling, clean applications.

Semiconductor Dry Pump Edwards IH80 IH160 IH600 IH1000 IH1800 IH1800HTX, Service and Repair
Dry pump Series: iH dry pump

Variations of the model: iH80, iH160, iH600, iH1000, iH1800, iH1800 HTX

Models Applications: Load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, strip/ashing, etching, implant source, HDP CVD, RTP, SACVD, MCVD, PECVD, LPCVD, ALD.

Semiconductor Dry Pump Edwards EPX180L-LE EPX500L-LE EPX180N-NE EPX500N-NE, Service and Repair
Dry pump Series: EPX on-tool High Vacuum Pumps

Variations of the model: EPX180L/LE, EPX500L/LE, EPX180N/NE, EPX500N/NE

Models Applications: Load lock, transfer chamber, PVD sputtering, ashing/PR strip, dielectric etch.
The EPX series covers a broad range of applications from wafer handling through to medium duty processes.
The EPX ‘N’ Series include a gas module that provides Nitrogen purge extending the application range to medium processes in which low levels of corrosive vapours and particulates are expected.

Semiconductor Dry Pump Edwards IGX100L IGX600L, Service and Repair
Dry pump Series: iGX-L

Variations of the model: iGX100L, iGX600L

Models Applications: Load lock, transfer, metrology.

Semiconductor Dry Pump Edwards IGX100L IGX600L, Service and Repair
Dry pump Series: iGX-N

Variations of the model: iGX100N, iGX600N, iGX1000N

Models Applications: Load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch, metal etch.

Semiconductor Dry Pump Edwards IGX100M IGX600M IGX1000MTI, Service and Repair
Dry pump Series: iGX-M

Variations of the model: iGX100M, iGX100MTI, iGX600M

Models Applications: Load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch, metal etch.

Semiconductor Dry Pump Edwards GX100N GX600N GX1000N, Service and Repair
Dry pump Series: GX-L

Variations of the model: GX100L, GX100TI, GX600L

Models Applications: Load lock, transfer, metrology.

Semiconductor Dry Pump Edwards GX100N GX600N GX1000N, Service and Repair
Dry pump Series: GX-N

Variations of the model: GX100N, GX600N, GX1000N

Models Applications: Load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch, metal etch.

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